Pneumatic high vacuum butterfly valve

The GIQ series pneumatic high vacuum butterfly valve represents a premium automation component engineered specifically for regulating or isolating fluid media within low and ultra high vacuum piping systems Fabricated with a mirror polished stainless steel body configuration it minimizes internal flow resistance and effectively prevents medium gas adsorption or outgassing contamination The valve is powered by an aluminum alloy rack and pinion pneumatic actuator integrated with an advanced top mounted limit switch box and control solenoid valve setup This comprehensive automation package ensures tight bidirectional sealing under high differential negative pressures making it an indispensable choice for semiconductor fabs chemical vacuum distillation networks and lithium battery vacuum drying chambers

Technical Specifications

• Valve Design Classification Pneumatic Actuated Centric Disked High Vacuum Butterfly Valve

• Body Material Grade Premium Stainless Steel 304 or 316 High Purity Casting

• Actuator Operational Drive Heavy Duty Double Acting Aluminum Rack and Pinion Pneumatic Actuator

• Top Automation Accessories Integrated Visual Limit Switch Box with Internal Micro Switches

• Pneumatic Control Air Supply 0.4 to 0.6 MPa Clean Dry Compressed Instrument Air

• Solenoid Valve Interface Standard NAMUR Design Double Acting Electronic Control Pilot Valve

• Applicable Vacuum Pressure Range 10 to the power of minus 5 Pa up to 0.1 MPa positive pressure

• Sealing Seat Material Profile High Performance Low Outgassing Viton Fluororubber Bonnet Ring

• Main Pipeline Connection Type ISO Flanged or PN 10 Raised Face Bolted Flanged Ends

• Valve Internal Disc Finish Mirror Polished Stainless Steel Disc for Clean Room Standards

• Internal Leakage Rate Standard Less than 10 to the power of minus 6 Pa Liters per Second

• Operating Ambient Temperature Range Minus 20 up to 80 degrees Celsius for Actuator Housing

• Maximum Medium Bake Temperature 150 degrees Celsius with High Performance Viton Elastomer Seats

• Shaft Sealing Architecture Double Tier Viton O Ring Shaft Seal with Vacuum Grease Barrier

• Flow Trajectory Geometry Concentric Disc Design for Maximum Conductance in High Vacuum Lines

• Actuator Surface Protection Anodized Aluminum Body with Chemical Resistant Blue Coated End Caps

• Electrical Conduit Connection Size Dual Cable Entry G 1 2 inch Threaded Wiring Ports

• Air Port Joint Specification G 1 4 inch Air Supply Connection Ports with Internal Threads

• Primary System Applications Semiconductor Processing Solar Cell Production Vacuum Furnaces Chemical Distillation

• Quality Verification Protocols Helium Mass Spectrometer Leak Detection and Vacuum Boundary Pressure Tests